Direct Write (Nano)lithography for Next Generation Device Fabrication
A ltalk about how direct write technologieenable advanced micro and nanolithography.
Date and time
Location
Singh Center for Nanotechnology
QNF Cleanroom 3205 Walnut Street Philadelphia, PA 19104About this event
- Event lasts 1 hour 30 minutes
Direct write technologies including optical and thermal lithography techniques enable advanced micro and nanolithography in a wide range of applications, many of which are impractical with conventional methods. Further innovations, including parallelization, online layout conversion, resolution range expansions keep the lithography solutions by Heidelberg Instruments at the forefront of this technology.
Thermal scanning probe lithography, possible with the NanoFrazor from Heidelberg Instruments, makes it possible to create nanostructures with real-time inspection and correction, in grayscale as well as in high resolution. These capabilities, combined with accurate, markerless second layer alignment and automation features, provide a versatile and unique nanofabrication tool to pave the way for new ideas and advances in nanophotonics, nanobiosystems, nanoelectronics and emerging materials research.
Building on the high-impact research carried out by NanoFrazor users in high-quality contacts to 2D materials, phase engineering, biomimicry, and arbitrary structures for optical surfaces, a new generation of the tool now makes it possible to expand to larger areas and automate significant portions of the user operations. Further applications to exploit optical effects on unexpected materials, as well as ever larger number of devices created in each lithography session, are expected as a result of the new developments.
ABOUT THE SPEAKER
Dr. Emine Çağın is Chief Technology Officer at Heidelberg Instruments Nano AG in Zurich, Switzerland, where she leads the development of thermal nanolithography technologies and supports their global deployment. She holds a Ph.D. in Electrical Engineering from the University of Michigan, Ann Arbor, with a focus on semiconductor physics. Following her doctorate, she carried out a postdoctoral fellowship in the Micro and Nanosystems group at ETH Zürich.
Before joining Heidelberg Instruments Nano in 2018, Dr. Çağın worked as a senior staff scientist at the Eastern Switzerland University of Applied Sciences (formerly NTB), contributing to applied research in micro- and nanotechnology.
In addition to her technical leadership, she is committed to making advanced technology more inclusive and sustainable.