$50 – $75

The Meeting for Advanced Electron Beam Lithography (MAEBL)

Event Information

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Date and Time

Location

Location

The Ohio State University

The Ohio Union in the Cartoon Room

1739 N High Street

Columbus, OH 43210

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Refund Policy

Refund Policy

Refunds up to 7 days before event

Event description

Description

The 3rd annual Meeting for Advanced Electron Beam Lithography (MAEBL) workshop will be hosted by The Ohio State Universtiy on Wednesday, April 3, 2019, from 7:30 AM to 6:00 PM. The program will begin at 8:30 AM. Arrive early to network, receive your name badge and to grab a coffee/light continental breakfast. Bring your business cards, laptop computer with designs and SEM images of your issues and an open mind. The goal of the meeting is to connect active novice to experienced EBL tool owners and users to openly exchange practical and directly applicable EBL knowledge in an open forum format. The event features invited talks from users in the field. In the years past, attendees have networked with like minded researchers and scientists and witnessed invited talks from Argonne National Laboratory, the National Institute of Standards and Technology, IBM, Ohio State University, The Pennsylvania State University, the University of Delaware, and Brookhaven National Laboratory. Join us!

This is a vendor free event. Registration helps to defer food costs for the venue. To qualify to attend, you must be an active EBL tool owner/user at a recognized academic, industry, or government lab and must sign up using your institution's e-mail. Registration is free of charge for speakers.

Topics of discussion include but are not limited to:

  • Proximity Effect Correction
  • Resist Characterization
  • Scripting and Automation
  • Pattern Fidelity Enhancement
  • Throughput Enhancement
  • Pattern Transfer (Etch and/or Lift-off)
  • Anti-charging
  • Image Processing
  • Data Preparation
  • Simulation
  • Device Fabrication


REGISTRATION
On-site registration will not be available. You must sign-up online in advance. Thanks for your understanding.

  • $50: Early Bird - Only 20 tickets available before February 1, 2019!
  • $75: General Registration available until April 3, 2019


PARKING
Parking is available on site: http://osu.campusparc.com/home/garages/academic-south-campus/ohio-union-south

GETTING HERE
If you're arriving by plane, you'll want to fly into the John Glenn International Airport (airport code: CMH). The airport is located 6 miles (10 kilometers) east of downtown Columbus.

REFUNDS
Registration refunds are available until March 27, 2019 (7 days prior to the event date); this means refunds cannot be issued beginning March 27, 2019, due to the catering reservation.

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Date and Time

Location

The Ohio State University

The Ohio Union in the Cartoon Room

1739 N High Street

Columbus, OH 43210

View Map

Refund Policy

Refunds up to 7 days before event

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