$650

Plasma Etching for Semiconductors- 1-day- course

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Embassy Suites by Hilton Convention Center Las Vegas

3600 Paradise Road

Las Vegas, NV 89169

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Event description
Training course for process engineers on Plasma Etching for Semiconductors

About this Event

To become expert in microfabrication. For beginners and intermediates. After this 1-day training, students will understand how a plasma is generated, how it behaves in the plasma reactor, and how it etches material. Concepts such as selectivity, etch profile, etch defects, etch interaction with photolithography, end point detection, etc. will be covered. Student will receive key knowledges that can be later applied on their systems to develop a plasma etching recipe by their own. Or to get better understanding on etching challenges in order to design and make complex process flows.

Content:

1. Plasma Fundamentals

2. Plasma Systems

3. Anisotropic Etching

4. Silicon and Compounds

5. Deep Reactive Ion Etching (DRIE)

6. Other material Etching

7. Profile characterization

8. End Point Detection

Speaker:

16 years experience in plasma etching and more than 20 years experience in semiconductor industry. Richard Beaudry is consultant in MEMS processing and integration.

www.rb-memsconsultant.com

https://www.linkedin.com/in/richard-beaudry-a8192811/

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Date and Time

Location

Embassy Suites by Hilton Convention Center Las Vegas

3600 Paradise Road

Las Vegas, NV 89169

View Map

Refund Policy

Contact the organizer to request a refund.

Eventbrite's fee is nonrefundable.

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