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Mid-Atlantic Electron Beam Lithography (MAEBL) Workshop

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Singh Center for Nanotechnology

3205 Walnut Street

Philadelphia, PA 19104

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Description

The first annual Mid-Atlantic Electron Beam Lithography (MAEBL) workshop will be hosted by the University of Pennsylvania Singh Center for Nanotechnology on Wednesday, April 19, 2017, from 9am to 5pm in the Glandt Forum. The goal of the meeting is to connect active novice to experienced EBL tool owners and users to openly exchange practical and directly applicable EBL knowledge in an open forum format. This is a vendor free event. Registration is free of charge; however to qualify to attend, you must be an active EBL tool owner or active user at a recognized academic, industry, or government lab.

The following topics to be discussed but are not limited to:

  • Advanced CAD: The CNST Toolkit

  • Etch/Deposition: Recipes for Pattern Transfer

  • Alternative Resist Technologies

  • Practical Process Modeling

  • Throughput Management

  • Managing Drift and Field Stitching

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Date and Time

Location

Singh Center for Nanotechnology

3205 Walnut Street

Philadelphia, PA 19104

View Map

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