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Atomic Scale Processing Workshop

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Minatec - Leti

3 Parvis Louis Néel

38000 Grenoble

France

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The aim of this one-day workshop is to give an overview of current topics in the field of atomic scale processing for a range of applications. It is open to scientists and technologists working in industry and academia, with an interest in recent progress plus future trends in research and development.

Participation is free but registration is mandatory. Lunch and refreshments are included.

Agenda: Please arrive at 8.45 for registration and coffee.

8:45-9:15 - Registration & Coffee

9:15-9:30 - Welcome & Introduction - Bernard André, Head of Materials and Technologies Department, Optronics and Photonics Division, CEA-LETI & Dr Mike Cooke, Oxford Instruments

9:30-10:00 - Atomic Layer Etch (ALE): A precision technique to enable tomorrow's technology
Dr Mike Cooke, Oxford Instruments

10:00-10:30 - Plasma etching processes at PTA using a Plasmalab 100 - Thomas Charvolin, Research engineer, INAC, PHELIQS/SINAPS laboratory

10:30-11:00 - 2D materials and ALD applications, Dr Ageeth Bol, Tue Eindhoven, NL

11:30-12:00 - Ion Beam developments in etch and deposition, Dr Sebastien Pochon, Oxford Instruments

12:00-12:30 - Atomic Layer Etch research developments at IMEC, Dr Jean-Francois de Marneffe, Senior Researcher, IMEC, Belgium

13:30-14:00 - Atomic Layer Deposition (ALD) New developments for atomic scale processing
Dr Harm Knoops, Oxford Instruments

14:00-14:30 - 2D materials fabrication technology and processes: The ‘Toolbox’ for Atomic Scale Processing, Dr Ravi Sundaram, Oxford Instruments

15:00-15:30 - Topic & speaker TBC

15:30-16:00 - Q & A session – ask the experts! Chaired by Dr Mike Cooke

16:00-16:15 - Close and networking

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Location

Minatec - Leti

3 Parvis Louis Néel

38000 Grenoble

France

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